JPH01100445U - - Google Patents
Info
- Publication number
- JPH01100445U JPH01100445U JP19544887U JP19544887U JPH01100445U JP H01100445 U JPH01100445 U JP H01100445U JP 19544887 U JP19544887 U JP 19544887U JP 19544887 U JP19544887 U JP 19544887U JP H01100445 U JPH01100445 U JP H01100445U
- Authority
- JP
- Japan
- Prior art keywords
- drive mechanism
- microscope
- probe card
- card holder
- mask plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19544887U JPH01100445U (en]) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19544887U JPH01100445U (en]) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100445U true JPH01100445U (en]) | 1989-07-05 |
Family
ID=31486126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19544887U Pending JPH01100445U (en]) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100445U (en]) |
-
1987
- 1987-12-22 JP JP19544887U patent/JPH01100445U/ja active Pending
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